Semiconductor Wafer Manufacturing
- Typical Applications: CVD / PVD chamber heating, wafer baking stations, photoresist prebaking, diffusion furnace heating, oxidation furnace heating, etching chamber preheating, vacuum chuck heating, wafer transfer channel heating, pre-coating preheating, post-development baking
- Core Heating Requirements: High vacuum, high purity, no outgassing, extremely high temperature uniformity
- Recommended Heating Elements: High-purity ceramic heating plates, vacuum-grade cartridge heaters
- Service Life: 1–2 years
