Semiconductor & Wafer Processing Heaters: Ultra-High Purity Precision
Semiconductor & Wafer Processing Heaters: Ultra-High Purity Precision
| Technical Specs | Range / Typical Values |
| Uniformity | ±1∘C across the surface |
| Materials | High-purity Quartz, Ceramic, or Coated Alloys |
| Voltage | Low voltage (24V/48V) or Standard 220V |
Atomic-Level Temperature Uniformity: Designed with multi-zone heating patterns to compensate for edge heat loss, achieving surface uniformity as tight as ±5% across the entire pedestal or chuck.
Ultra-High Vacuum (UHV) Compatibility: Constructed with low-outgassing materials and hermetic ceramic-to-metal seals, ensuring zero contamination in CVD (Chemical Vapor Deposition) and PVD (Physical Vapor Deposition) chambers.
Corrosion Resistance in Plasma Environments: Available with specialized coatings (such as Yttria or Anodization) to resist the aggressive fluorine and chlorine-based gases used in plasma etching.
Rapid Thermal Cycling: Low-mass designs allow for high ramp rates, reducing TACT (Total Actual Cycle Time) and increasing throughput in batch processing.
| Feature | Ceramic Substrate Heaters | Pedestal/Alu-Nitride (AlN) |
| Substrate Material | High-Purity Alumina (Al2O3) | Aluminum Nitride (AlN) |
| Max Temperature | Up to 1100°F (600°C) | Up to 1832°F (1000°C) |
| Uniformity | Extreme Precision | Ultra-High Precision |
| Typical Application | Photoresist Baking, Asher | CVD, PECVD, Etch, RTP |
Deposition Processes: Providing the precise thermal energy required for CVD, ALD (Atomic Layer Deposition), and Epitaxy.
Plasma Etching: Maintaining consistent electrode temperatures to ensure uniform feature profiles across the wafer.
Wafer Baking & Curing: Precision heating for photoresist soft-baking and hard-baking in track systems.
Ion Implantation: Controlling the temperature of the end-station to prevent crystal lattice damage.
CMP (Chemical Mechanical Planarization): Slurry and platen temperature control for consistent removal rates.
For critical industrial processes, a heating element is only as good as its durability and control. At Runkel, we specialize in high-spec thermal engineering. From high-vacuum environments to hazardous explosion-proof zones, we provide fully customized heaters integrated with bespoke Control Cabinets for a true “plug-and-play” experience.
The Total Solution: Integrated Control Cabinets. We don’t just provide the heat; we provide the brain. To ensure your heating system operates safely and accurately, we offer Custom-Built Control Cabinets tailored to your specific heater:Precise Control: PID or PLC-based systems for temperature accuracy within $\pm 1$°C.Safety First: Integrated over-temperature protection, leakage circuit breakers, and emergency stops.User Interface: Digital displays, HMI touchscreens, or remote monitoring capabilities.Custom Voltage: Built to match your local industrial power standards (e.g., 220V, 380V, 440V, or 480V).
“Complex Requirements, Simple Execution.”
Direct Replacement of Legacy Parts:
If your imported equipment has a failed flanged heater or a specialized vacuum element that is too expensive or slow to source from the OEM, we can reverse-engineer and manufacture a replacement that meets or exceeds the original specs.
Material Excellence:
We select materials based on your environment—whether it’s Incoloy 800 for high-temperature oxidation or Pure PTFE for chemical longevity.
Start Your Custom Build Today
Whether you need a replacement Defrost Heater for a cold storage unit or a complete Explosion-Proof Circulation System with a control panel, we are ready to assist.